The IBF Machine from Opteg

2015-07-21

Recently, the IBF (Iron Beam Figuring) machine from Opteg, of which Toplens has been the only agent, achieved great success in an EUV project managed by Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Science. Opteg's IBF technology is not only able to correct lens surface, but also to improve smoothness through etching, thus, obtaining φ220mm mirrors that have a PV less than 2.75nm and an RMS less than 0.25nm so as to meet the requirement of DUV and EUV lithography lenses. The lens surfaces before and after the correction are as follows: